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| Department: |
Electrical & Computer Engineering |
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| Platform Name: |
MicroWriter ML3 Baby Plus
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| Model/Type: |
NEW
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| Description: |
The MicroWriter ML3 Baby Plus (Durham Magneto Optics) is a compact, high-performance direct-write optical lithography machine designed for rapid prototyping and small volume manufacturing in R&D laboratories and clean rooms. It features a maximum writing area of 149mm x 149mm and supports wafer sizes up to 155mm x 155mm x 7mm. The system uses a 405nm long-life semiconductor lightsource suitable for broadband, g- and h-line photoresists, with optional 385nm and 365nm lightsources available. It includes an XY interferometer with 15nm resolution for precise motion control and a fast writing speed of up to 50mm²/minute for 1µm minimum feature size and 180mm²/minute for 5µm minimum feature size. The MicroWriter ML3 Baby Plus also offers an autofocus system, high-quality optical microscope, and grey scale exposure mode for 3-dimensional patterning. Additionally, it features an optical surface profilometer tool and an automated wafer inspection tool for examining fabricated structures. Ideal for small-scale photolithography tasks, it is suitable for applications in microfluidics, MEMS, and semiconductor research, providing reliable performance but may require specialized training.
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| Location: |
S-EV 16 222 |
| Disclaimer |
Please note that there are restrictions on the use of the Genome Foundry's equipment. As such, some items may not be removed from our facilities. For details, please contact the Platform Supervisor.
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| Note: |
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| Concordia Academic Rate (Internal): |
FREE * |
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Availability: |
Days of week: SuMTWThFSa
Weekday hrs: 00:00 - 24:00
Weekend hrs: 00:00 - 24:00
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Contact: |
Nicholas Gold |
Reserve It
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